The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2015

Filed:

May. 11, 2012
Applicants:

Craig M. Herzinger, Lincoln, NE (US);

Mathias M. Schubert, Lincoln, NE (US);

Tino Hofmann, Lincoln, NE (US);

Martin M. Liphardt, Lincoln, NE (US);

John A. Woollam, Lincoln, NE (US);

Inventors:

Craig M. Herzinger, Lincoln, NE (US);

Mathias M. Schubert, Lincoln, NE (US);

Tino Hofmann, Lincoln, NE (US);

Martin M. Liphardt, Lincoln, NE (US);

John A. Woollam, Lincoln, NE (US);

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G01J 4/04 (2006.01); G01N 21/21 (2006.01); G01N 21/35 (2014.01); G01J 5/20 (2006.01); G01J 5/42 (2006.01);
U.S. Cl.
CPC ...
G01J 4/04 (2013.01); G01N 21/211 (2013.01); G01N 21/3581 (2013.01); G01J 5/20 (2013.01); G01J 5/42 (2013.01); G01N 2021/3595 (2013.01);
Abstract

The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including:


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