The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2015

Filed:

Dec. 21, 2012
Applicant:

Agilent Technologies, Inc., Loveland, CO (US);

Inventors:

Gregg Ressler, Shelton, CT (US);

Jeffrey H. Saller, Milford, CT (US);

Assignee:

Agilent Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01B 9/02 (2006.01); G01J 3/45 (2006.01); G01N 21/35 (2014.01);
U.S. Cl.
CPC ...
G01B 9/02015 (2013.01); G01J 3/45 (2013.01); G01N 21/35 (2013.01); G01N 2021/3595 (2013.01);
Abstract

An interferometer includes a fixed assembly including a base, a beam splitter assembly and a fixed mirror, and a movable assembly including an upper scan carriage, a lower scan carriage and a movable mirror connected to the lower scan carriage. The pair of inner bearing flexures is connected to the base and the upper scan carriage, enabling movement of the upper scan carriage relative to the base, and the pair of outer bearing flexures is connected to the upper and lower scan carriages, enabling movement of the lower scan carriage relative to the upper scan carriage. The movement of the upper and lower scan carriages enable a scan movement of the movable mirror in a scan direction restricted such that the scan movement maintains a plane containing the movable mirror parallel to planes containing the movable mirror at respective distances between the movable and fixed assemblies during the scan movement.


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