The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2015

Filed:

Sep. 25, 2007
Applicants:

Kazuhiro Atsumi, Hamamatsu, JP;

Koji Kuno, Hamamatsu, JP;

Tatsuya Suzuki, Hamamatsu, JP;

Inventors:

Kazuhiro Atsumi, Hamamatsu, JP;

Koji Kuno, Hamamatsu, JP;

Tatsuya Suzuki, Hamamatsu, JP;

Assignee:

Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); H01L 21/78 (2006.01); B23K 26/40 (2014.01); C03B 33/02 (2006.01); C03B 33/09 (2006.01); B23K 26/04 (2014.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); B23K 26/4075 (2013.01); C03B 33/0222 (2013.01); C03B 33/091 (2013.01); B23K 26/0057 (2013.01); B23K 26/046 (2013.01); B23K 26/048 (2013.01); B23K 2201/40 (2013.01); H01L 21/02381 (2013.01); H01L 21/02675 (2013.01);
Abstract

A modified region is accurately formed at a desirable position with respect to a laser light irradiation surface of an object to be processed. When an average difference γ has a value exceeding a predetermined threshold during trace recording, a particle segment Z including a line segment S where the average difference γ exceeds the predetermined threshold is defined. This determines that a particle exists on a line to cutand randomly reflects measuring laser light, whereby a segment where the presence of the particle affects a control signal in a line segment to cut is detected as the particle segment Z. Correcting the control signal in the particle segment Z inhibits a converging lens from moving more than necessary because of an error included in the signal value under the influence of the presence of the particle, thus allowing the converging point of the processing laser light to accurately follow a front face


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