The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2015

Filed:

Jul. 02, 2014
Applicant:

Nalco Company, Naperville, IL (US);

Inventors:

Amy M. Tseng, Woodridge, IL (US);

Brian V. Jenkins, Warrenville, IL (US);

Robert M. Mack, Milwaukie, OR (US);

Assignee:

Nalco Company, Naperville, IL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/75 (2006.01); G01N 31/22 (2006.01); G01N 35/08 (2006.01); B81C 1/00 (2006.01); H01L 21/67 (2006.01); C09K 13/00 (2006.01);
U.S. Cl.
CPC ...
G01N 31/221 (2013.01); G01N 35/085 (2013.01); B81C 2201/0132 (2013.01); B81C 1/00531 (2013.01); H01L 21/67063 (2013.01); B81C 2201/0142 (2013.01); C09K 13/00 (2013.01);
Abstract

The invention is directed towards methods and compositions for identifying the amount of ammonium acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of ammonium acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of ammonium acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the ammonium acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.


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