The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Dec. 22, 2008
Applicants:
Johan Willem Berenschot, Winterswijk, NL;
Niels Roelof Tas, Enschede, NL;
Inventors:
Johan Willem Berenschot, Winterswijk, NL;
Niels Roelof Tas, Enschede, NL;
Assignee:
Universiteit Twente, Enschede, NL;
Primary Examiner:
Int. Cl.
CPC ...
C03C 15/00 (2006.01); C03C 25/68 (2006.01); B81C 1/00 (2006.01); G01Q 70/10 (2010.01); G01Q 70/16 (2010.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
B81C 1/00111 (2013.01); G01Q 70/10 (2013.01); G01Q 70/16 (2013.01); B81C 2201/034 (2013.01); B82Y 35/00 (2013.01);
Abstract
The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.