The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Feb. 04, 2003
Applicants:
Xavier Fanton, Bois, FR;
Jean-christophe Giron, Aachen, DE;
Inventors:
Xavier Fanton, Bois, FR;
Jean-Christophe Giron, Aachen, DE;
Assignee:
Saint-Gobain Glass France, Courbevoie, FR;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); G02F 1/15 (2006.01); C04B 35/01 (2006.01); C23C 14/08 (2006.01); G02F 1/01 (2006.01); C23C 14/35 (2006.01);
U.S. Cl.
CPC ...
G02F 1/1523 (2013.01); C23C 14/35 (2013.01); C04B 35/01 (2013.01); C04B 2235/3279 (2013.01); C04B 2235/405 (2013.01); C04B 2235/652 (2013.01); C04B 2235/6584 (2013.01); C04B 2235/79 (2013.01); C04B 2235/96 (2013.01); C23C 14/085 (2013.01); C23C 14/3414 (2013.01); G02F 1/011 (2013.01); Y02T 50/67 (2013.01);
Abstract
The subject of the invention is an essentially ceramic target for a sputtering device, especially for magnetically enhanced sputtering, said target comprising predominantly nickel oxide, the nickel oxide NiObeing oxygen-deficient with respect to the stoichiometric composition.