The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2015

Filed:

Nov. 19, 2012
Applicant:

Samsung Corning Precision Materials Co., Ltd., Gyeongsangbuk-do, KR;

Inventors:

Sooho Park, ChungCheongNam-Do, KR;

Seohyun Kim, ChungCheongNam-Do, KR;

Jeongwoo Park, ChungCheongNam-Do, KR;

Taejung Park, ChungCheongNam-Do, KR;

YoungZo Yoo, ChungCheongNam-Do, KR;

GunSang Yoon, ChungCheongNam-Do, KR;

Eun-Ho Choi, ChungCheongNam-Do, KR;

Myong Woon Kim, ChungCheongNam-Do, KR;

Bogyeong Kim, ChungCheongNam-Do, KR;

Hyung Soo Shin, ChungCheongNam-Do, KR;

Seung Ho Yoo, ChungCheongNam-Do, KR;

Sang Do Lee, ChungCheongNam-Do, KR;

Sang Ick Lee, ChungCheongNam-Do, KR;

Sang Jun Yim, ChungCheongNam-Do, KR;

Assignee:

Samsung Corning Precision Materials Co., Ltd., Gumi-Si, Gyeongsangbuk-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 17/27 (2006.01); C07F 3/06 (2006.01); C23C 16/00 (2006.01); C07F 17/00 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
C07F 3/06 (2013.01); C07F 17/00 (2013.01); C23C 16/407 (2013.01);
Abstract

A zinc oxide precursor for use in deposition of a zinc oxide-based thin film contains a zincocene having the following formula or a derivative thereof:


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