The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Mar. 07, 2012
Applicants:
James P. Cruse, Santa Cruz, CA (US);
Ezra Robert Gold, Sunnyvale, CA (US);
John W. Lane, San Jose, CA (US);
Inventors:
James P. Cruse, Santa Cruz, CA (US);
Ezra Robert Gold, Sunnyvale, CA (US);
John W. Lane, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 11/22 (2006.01); B01F 3/02 (2006.01); G05D 11/13 (2006.01);
U.S. Cl.
CPC ...
B01F 3/028 (2013.01); G05D 11/132 (2013.01);
Abstract
Methods and apparatus for delivery of gas are provided herein. In some embodiments, a gas delivery system may include a premix tank having an inlet and an outlet; a plurality of gas supplies coupled to the inlet of the premix tank; a plurality of valves, each valve respectively disposed in line with a corresponding one of the plurality of gas supplies; and a conduit coupling the outlet of the premix tank to one or more gas delivery zones.