The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Mar. 04, 2011
Hideo Adachi, Iruma, JP;
Katsuhiro Wakabayashi, Tokyo, JP;
Akiko Mizunuma, Tokyo, JP;
Atsushi Osawa, Tokyo, JP;
Tatsuo Kaimai, Tokyo, JP;
Shinji Yasunaga, Asaka, JP;
Kiyoshi Nemoto, Tokyo, JP;
Miyuki Murakami, Tokyo, JP;
Kousei Tamiya, Sagamihara, JP;
Yu Kondo, Yamato, JP;
Hideo Adachi, Iruma, JP;
Katsuhiro Wakabayashi, Tokyo, JP;
Akiko Mizunuma, Tokyo, JP;
Atsushi Osawa, Tokyo, JP;
Tatsuo Kaimai, Tokyo, JP;
Shinji Yasunaga, Asaka, JP;
Kiyoshi Nemoto, Tokyo, JP;
Miyuki Murakami, Tokyo, JP;
Kousei Tamiya, Sagamihara, JP;
Yu Kondo, Yamato, JP;
Olympus Corporation, Tokyo, JP;
Abstract
A capacitive ultrasonic transducer (c-MUT) comprising a silicon substrate and a transducer element which comprises transducer cells, each of which is constituted by a first electrode equipped on the top surface of the silicon substrate, a second electrode placed opposite to the first electrode with a predetermined gap therefrom and a membrane for supporting the second electrode, wherein a trench is equipped between the adjacent transducers and a conductive film is formed in the trench.