The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Aug. 13, 2013
Applicant:
Lightmachinery Inc., Nepean, CA;
Inventors:
Jesse Dean, Ottawa, CA;
Ian J. Miller, Ottawa, CA;
Edward S. Williams, Kanata, CA;
John H. Hunter, Almonte, CA;
Assignee:
LightMachinery Inc., Ottawa, CA;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/22 (2006.01); H01S 3/225 (2006.01); H01S 3/036 (2006.01);
U.S. Cl.
CPC ...
H01S 3/036 (2013.01);
Abstract
An excimer laser system in which the expensive noble gases are reclaimed, while the halogen gas is sacrificed, and the impurities developed during operation of the excimer laser are removed. In the approach disclosed a multi-stage gas purifier is used with a single, premix gas bottle containing a halogen-rich laser gas mixture comprising noble, buffer and halogen gas, to maintain the optimum halogen content of the laser, while also maintaining a consistent ratio of noble, buffer and halogen gases without complicated control apparatus.