The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Feb. 01, 2013
Applicants:
Johannes Classen, Reutlingen, DE;
Jochen Reinmuth, Reutlingen, DE;
Andreas Scheurle, Leonberg, DE;
Inventors:
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); G01P 15/08 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0018 (2013.01); B81C 1/00015 (2013.01); B81C 1/0015 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); B81B 2201/025 (2013.01);
Abstract
A method for manufacturing a micromechanical component is described in which a trench etching process and a sacrificial layer etching process are carried out to form a mass situated movably on a substrate. The movable mass has electrically isolated and mechanically coupled subsections of a functional layer. A micromechanical component having a mass situated movably on a substrate is also described.