The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2015

Filed:

Feb. 21, 2012
Applicants:

Chunlin Xie, Guangdong, CN;

Xilin Su, Guangdong, CN;

Hongpo HU, Guangdong, CN;

Wang Zhang, Guangdong, CN;

Inventors:

Chunlin Xie, Guangdong, CN;

Xilin Su, Guangdong, CN;

Hongpo Hu, Guangdong, CN;

Wang Zhang, Guangdong, CN;

Assignees:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 29/06 (2006.01); H01L 33/02 (2010.01); H01L 33/20 (2010.01); H01L 21/02 (2006.01); H01L 33/32 (2010.01); C30B 25/18 (2006.01);
U.S. Cl.
CPC ...
H01L 33/20 (2013.01); H01L 33/02 (2013.01); H01L 21/02658 (2013.01); H01L 33/007 (2013.01); H01L 21/0237 (2013.01); H01L 29/06 (2013.01); H01L 21/02458 (2013.01); H01L 21/0243 (2013.01); H01L 33/32 (2013.01); H01L 21/0254 (2013.01); C03B 29/403 (2013.01); C30B 25/186 (2013.01);
Abstract

A groove structure formed on a surface of a substrate. The groove structure includes a lateral epitaxial pattern in a cross section perpendicular to the surface, which has: a first edge inclined to the surface; a second edge adjacent to first edge and parallel to the surface; a third edge parallel to the first edge, having a projection on the surface covering the second edge; and a fourth edge adjacent to the third edge. A first intersection between the second edge and the third edge on the second edge and an injection of a second intersection between the third edge and the fourth edge on the second edge are located on two sides of a third intersection between the first edge and the second edge, or the injection of the second intersection between the third edge and the fourth edge on the second edge coincides with the third intersection.


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