The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Aug. 02, 2013
Sumitomo Electric Industries, Ltd., Osaka, JP;
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Abstract
A trench having a side wall and a bottom portion is formed in a silicon carbide substrate. A trench insulating film is formed to cover the bottom portion and the side wall. A silicon film is formed to fill the trench with the trench insulating film being interposed therebetween. The silicon film is etched so as to leave a portion of the silicon film that is disposed on the bottom portion with the trench insulating film being interposed therebetween. The trench insulating film is removed from the side wall. By oxidizing the silicon film, a bottom insulating film is formed. A side wall insulating film is formed on the side wall.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile