The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Mar. 15, 2013
Applicants:
Masahiro Ishimori, Inagi, JP;
Masaru Shinkai, Yokohama, JP;
Satoshi Mizukami, Sagamihara, JP;
Inventors:
Assignee:
Ricoh Company, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); H01L 41/047 (2006.01); H01L 41/314 (2013.01); H01L 41/09 (2006.01); H01L 41/29 (2013.01); H01L 41/318 (2013.01); B41J 2/14 (2006.01); B41J 2/16 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0477 (2013.01); B41J 2/045 (2013.01); H01L 41/314 (2013.01); H01L 41/0973 (2013.01); H01L 41/0478 (2013.01); H01L 41/29 (2013.01); H01L 41/318 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1642 (2013.01); B41J 2/1645 (2013.01); B41J 2/1646 (2013.01); B41J 2002/14241 (2013.01); B41J 2202/03 (2013.01);
Abstract
A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance, and an upper electrode provided on the piezoelectric thin film, wherein the lower electrode includes a titanium oxide film formed on the vibration plate, a platinum film formed on the titanium oxide film, and a conductive oxide film formed on the platinum film and, the platinum film and the conductive oxide film being a solid film with no holes.