The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
May. 29, 2012
Andrew C. Mcneil, Chandler, AZ (US);
Gary G. LI, Chandler, AZ (US);
Lisa Z. Zhang, Chandler, AZ (US);
Yizhen Lin, Niskayuna, NY (US);
Andrew C. McNeil, Chandler, AZ (US);
Gary G. Li, Chandler, AZ (US);
Lisa Z. Zhang, Chandler, AZ (US);
Yizhen Lin, Niskayuna, NY (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A MEMS sensor () includes a support structure () suspended above a surface () of a substrate () and connected to the substrate () via spring elements (). A proof mass () is suspended above the substrate () and is connected to the support structure () via torsional elements (). Electrodes (), spaced apart from the proof mass (), are connected to the support structure () and are suspended above the substrate (). Suspension of the electrodes () and proof mass () above the surface () of the substrate () via the support structure () substantially physically isolates the elements from deformation of the underlying substrate (). Additionally, connection via the spring elements () result in the MEMS sensor () being less susceptible to movement of the support structure () due to this deformation.