The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Mar. 09, 2012
Applicant:
Seiichi Omoto, Mie, JP;
Inventor:
Seiichi Omoto, Mie, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 27/115 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11521 (2013.01); H01L 27/11543 (2013.01);
Abstract
According to one embodiment, a semiconductor device includes a polysilicon film formed above a semiconductor substrate, and a silicide film of a metal formed on the polysilicon film. The semiconductor device of the embodiment includes an oxide film of the metal formed above the silicide film, and a film containing tungsten or molybdenum formed on the oxide film.