The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Mar. 02, 2010
Applicant:
Yoshiaki Shimooka, Tokyo, JP;
Inventor:
Yoshiaki Shimooka, Tokyo, JP;
Assignee:
Kabushiki Kaisha Toshiba, Minato-Ku, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); B81B 3/00 (2006.01); H03H 3/007 (2006.01); H03H 9/10 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0051 (2013.01); H03H 3/0072 (2013.01); H03H 9/1057 (2013.01); H03H 9/02259 (2013.01); B81B 2201/0271 (2013.01); B81C 2203/0136 (2013.01); H03H 2009/0244 (2013.01);
Abstract
A MEMS device includes: a movable element supported by a supporting member on a substrate; an encapsulation structure provided above the substrate so as to encapsulate the movable element; and a fin that is made of an insulation film, provided above the substrate, and provided inside of the encapsulation structure and outside of the movable element, and a part of the fin being positioned between a height from the substrate when the movable element are turned ON and a height from the substrate when the movable element are turned OFF.