The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Jul. 15, 2010
Jong-heon Kim, Yongin, KR;
Hyun-sook Park, Yongin, KR;
Jae-kwang Ryu, Yongin, KR;
Hee-cheol Kang, Yongin, KR;
Ji-sook OH, Yongin, KR;
Jong-Heon Kim, Yongin, KR;
Hyun-Sook Park, Yongin, KR;
Jae-Kwang Ryu, Yongin, KR;
Hee-Cheol Kang, Yongin, KR;
Ji-Sook Oh, Yongin, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.