The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 30, 2014

Filed:

Aug. 12, 2013
Applicant:

Samsung Display Co., Ltd., Yongin, KR;

Inventors:

Hong-Sick Park, Suwon-si, KR;

Young-Jun Kim, Seoul, KR;

Young-Woo Park, Seongnam-si, KR;

Wang-Woo Lee, Osan-si, KR;

Won-Guk Seo, Suwon-si, KR;

Sam-Young Cho, Anyang-si, KR;

Seung-Yeon Han, Yongin-si, KR;

Gyu-Po Kim, Hwaseong-si, KR;

Hyun-Cheol Shin, Hwaseong-si, KR;

Ki-Beom Lee, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/67 (2006.01); H01L 21/28 (2006.01); H01L 27/12 (2006.01); C23F 1/18 (2006.01);
U.S. Cl.
CPC ...
C23F 1/18 (2013.01); H01L 21/67075 (2013.01); H01L 21/28008 (2013.01); H01L 27/1259 (2013.01);
Abstract

An etchant composition includes about 25 percent by weight to about 35 percent by weight of phosphoric acid, about 3 percent by weight to about 9 percent by weight of nitric acid, about 10 percent by weight to about 20 percent by weight of acetic acid, about 5 percent by weight to about 10 percent by weight of a nitrate, about 6 percent by weight to about 15 percent by weight of a sulfonic acid, about 1 percent by weight to about 5 percent by weight of an amine compound including a carboxyl group, about 0.1 percent by weight to about 1 percent by weight of a water-soluble amino acid, about 0.01 percent by weight to about 1 percent by weight of an azole compound, and water.


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