The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
May. 11, 2011
Applicants:
Tadashi Ikeda, Kawasaki, JP;
Gen Goshokubo, Kawasaki, JP;
Hiroshi Sone, Sagamihara, JP;
Inventors:
Assignee:
Canon Anelva Corporation, Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 15/00 (2006.01); B25J 9/04 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67727 (2013.01); B25J 15/0052 (2013.01); B25J 9/042 (2013.01); H01L 21/67346 (2013.01); H01L 21/67712 (2013.01); H01L 21/67718 (2013.01); H01L 21/6776 (2013.01); Y10S 414/138 (2013.01); Y10S 414/141 (2013.01); Y10S 414/135 (2013.01); Y10S 901/31 (2013.01);
Abstract
A substrate support apparatus which can support a substrate having a center hole, comprises a support portion which can support the substrate. The support portion includes a support groove with a cross-sectional shape in which a groove width gradually increases in a counter-gravitational direction, and a width of the support groove between two end portions is larger than a width of the support groove at the center thereof.