The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 30, 2014

Filed:

Oct. 07, 2011
Applicants:

Takao Tokumoto, Osaka, JP;

Sadao Natsu, Osaka, JP;

Mitsuhiro Hida, Osaka, JP;

Souichirou Iwasaki, Osaka, JP;

Tsuyoshi Sato, Yokohama, JP;

Kenichi Ooshiro, Yokohama, JP;

Inventors:

Takao Tokumoto, Osaka, JP;

Sadao Natsu, Osaka, JP;

Mitsuhiro Hida, Osaka, JP;

Souichirou Iwasaki, Osaka, JP;

Tsuyoshi Sato, Yokohama, JP;

Kenichi Ooshiro, Yokohama, JP;

Assignees:

Chugai Ro Co., Ltd, Osaka-Shi, JP;

Kabushiki Kaisha Toshiba, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 3/00 (2006.01); B05B 13/02 (2006.01); B05C 11/02 (2006.01); H01L 21/67 (2006.01); B05C 13/02 (2006.01); B05D 1/00 (2006.01); B05D 1/26 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6715 (2013.01); B05C 13/02 (2013.01); B05D 1/002 (2013.01); B05D 1/26 (2013.01);
Abstract

A cylindrical coating nozzle having a flattened end is placed above a coating object being rotated. A coating solution is applied to a surface of the coating object by discharging the coating solution form a nozzle orifice at an end of the coating nozzle while moving the coating nozzle relative to the coating object in a direction intersecting a rotational direction of the coating object. The coating nozzle is formed with an angled notch at a part of the end thereof. A rotation control unit controls the rotation of the coating nozzle in a manner that the notch of the coating nozzle is positioned upstream from a position to feed the coating solution to the coating object being rotated.


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