The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Dec. 01, 2011
Applicants:
Michael W. Judy, Ipswich, MA (US);
John A. Geen, Tewksbury, MA (US);
Houri Johari-galle, Sunnyvale, CA (US);
Inventors:
Michael W. Judy, Ipswich, MA (US);
John A. Geen, Tewksbury, MA (US);
Houri Johari-Galle, Sunnyvale, CA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01P 15/125 (2006.01); G01C 19/5698 (2012.01); G01C 19/5684 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5698 (2013.01); G01C 19/5684 (2013.01);
Abstract
One or more electrodes that interact with a movable mass in a MEMS device are anchored or otherwise supported from both the top and bottom and optionally also from one or more of the lateral sides other than the transduction side (i.e., the side of the electrode facing the mass) in order to severely restrict movement of the electrodes such as from interaction with the mass and/or external forces.