The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2014
Filed:
Nov. 19, 2013
Eastman Chemical Company, Kingsport, TN (US);
Michael Wayne Quillen, Gray, TN (US);
Dale Edward O'Dell, Blountville, TN (US);
Zachary Philip Lee, Conyers, GA (US);
John Cleaon Moore, Camarillo, CA (US);
Edward Enns McEntire, Kingsport, TN (US);
Spencer Erich Hochstetler, Kingsport, TN (US);
Richard Dalton Peters, Westfield, IN (US);
Rodney Scott Armentrout, Kingsport, TN (US);
Darryl W. Muck, Kingsport, TN (US);
Eastman Chemical Company, Kingsport, TN (US);
Abstract
Processes associated apparatus and compositions useful for removing organic substances from substrates, for example, electronic device substrates such as microelectronic wafers or flat panel displays, are provided. Processes are presented that apply a minimum volume of a composition as a coating to the inorganic substrate whereby sufficient heat is added and the organic substances are completely removed by rinsing. The compositions and processes may be suitable for removing and, in some instances, completely dissolving photoresists of the positive and negative varieties as well as thermoset polymers from electronic devices.