The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2014
Filed:
May. 24, 2011
Applicants:
Mitsuru Shimamoto, Tsu, JP;
Takahiro Maekawa, Tsu, JP;
Inventors:
Mitsuru Shimamoto, Tsu, JP;
Takahiro Maekawa, Tsu, JP;
Assignee:
Nabtesco Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/08 (2006.01); H01L 21/677 (2006.01); B25J 19/00 (2006.01); B25J 9/04 (2006.01); B25J 9/10 (2006.01); B25J 11/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/677 (2013.01); B25J 19/0066 (2013.01); B25J 9/08 (2013.01); B25J 9/042 (2013.01); B25J 9/1065 (2013.01); B25J 11/0095 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01); Y10S 901/28 (2013.01);
Abstract
A robot arm for transporting semiconductor wafers includes a hand, a lower arm link, and an upper arm link. The hand is connected to the lower arm link via a first joint, and the upper arm link is connected to the lower arm link via a second joint. The lower arm link is capable of being separated at a location between the first joint and the second joint.