The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2014
Filed:
Aug. 29, 2012
Iris Bominaar-silkens, Valkenswaard, NL;
Andres Felipe Vasquez Quintero, Neuchatel, CH;
Klaus Reimann, Eindhoven, NL;
Twan Van Lippen, Bladel, NL;
Remco Henricus Wilhelmus Pijnenburg, Hoogeloon, NL;
Iris Bominaar-Silkens, Valkenswaard, NL;
Andres Felipe Vasquez Quintero, Neuchatel, CH;
Klaus Reimann, Eindhoven, NL;
Twan Van Lippen, Bladel, NL;
Remco Henricus Wilhelmus Pijnenburg, Hoogeloon, NL;
NXP, B.V., Eindhoven, NL;
Abstract
A MEMS device, such as a microphone, uses a fixed perforated plate. The fixed plate comprises an array of holes across the plate area. At least a set of the holes adjacent the outer periphery comprises a plurality of rows of elongate holes, the rows at different distances from the periphery. This design improves the mechanical robustness of the membrane and can additionally allow tuning of the mechanical behavior of the plate.