The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2014

Filed:

Apr. 29, 2011
Applicants:

Mathieu Kociak, Palaiseau, FR;

Luiz Fernando Zagonel, Campanas, BR;

Marcel Tence, Issy les Moulineaux, FR;

Stefano Mazzucco, Bethesda, MD (US);

Inventors:

Mathieu Kociak, Palaiseau, FR;

Luiz Fernando Zagonel, Campanas, BR;

Marcel Tence, Issy les Moulineaux, FR;

Stefano Mazzucco, Bethesda, MD (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/64 (2006.01); G01N 23/225 (2006.01); H01J 37/244 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); G01N 23/2254 (2013.01); H01J 2237/24485 (2013.01); H01J 2237/024 (2013.01); H01J 37/244 (2013.01); H01J 2237/2802 (2013.01); H01J 37/228 (2013.01);
Abstract

A cathodoluminescence detection system is provided, including a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending the light radiation to an analyzer, a positioner for the collection optic; the positioner including several translation components of the collection optic. Each translation component effects the translation of the collection optic in one dimension of space so that the translation components effect the translation of the collection optic in several dimensions of space.


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