The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2014

Filed:

May. 23, 2011
Applicants:

Guojun Liu, San Jose, CA (US);

Uma Srinivasan, Mountain View, CA (US);

Shivkumar Chiruvolu, San Jose, CA (US);

Inventors:

Guojun Liu, San Jose, CA (US);

Uma Srinivasan, Mountain View, CA (US);

Shivkumar Chiruvolu, San Jose, CA (US);

Assignee:

NanoGram Corporation, Milpitas, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/22 (2006.01); H01L 21/38 (2006.01); H01L 21/02 (2006.01); H01L 21/225 (2006.01); H01L 21/228 (2006.01); B82Y 30/00 (2011.01); H01L 31/068 (2012.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/2252 (2013.01); H01L 21/2225 (2013.01); H01L 21/228 (2013.01); B82Y 30/00 (2013.01); H01L 31/068 (2013.01); H01L 31/0682 (2013.01); H01L 31/1804 (2013.01); Y02E 10/52 (2013.01); Y02E 10/547 (2013.01);
Abstract

The use of doped silicon nanoparticle inks and other liquid dopant sources can provide suitable dopant sources for driving dopant elements into a crystalline silicon substrate using a thermal process if a suitable cap is provided. Suitable caps include, for example, a capping slab, a cover that may or may not rest on the surface of the substrate and a cover layer. Desirable dopant profiled can be achieved. The doped nanoparticles can be delivered using a silicon ink. The residual silicon ink can be removed after the dopant drive-in or at least partially densified into a silicon material that is incorporated into the product device. The silicon doping is suitable for the introduction of dopants into crystalline silicon for the formation of solar cells.


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