The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2014
Filed:
Jul. 13, 2012
Hans-joachim Scheibe, Dresden, DE;
Thomas Schuelke, Brighton, MI (US);
Lars Haubold, East Lansing, MI (US);
Michael Becker, East Lansing, MI (US);
Yaran Mahmut, East Lansing, MI (US);
Hans-Joachim Scheibe, Dresden, DE;
Thomas Schuelke, Brighton, MI (US);
Lars Haubold, East Lansing, MI (US);
Michael Becker, East Lansing, MI (US);
Yaran Mahmut, East Lansing, MI (US);
Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V., Munich, DE;
Fraunhofer USA, Inc., Plymouth, MI (US);
Abstract
A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.