The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2014

Filed:

Apr. 20, 2012
Applicants:

Valery M. Dubin, Portland, OR (US);

Xingling Xu, Moses Lake, WA (US);

Yingxiang Tao, Moses Lake, WA (US);

James D. Blanchard, Soap Lake, WA (US);

Inventors:

Valery M. Dubin, Portland, OR (US);

Xingling Xu, Moses Lake, WA (US);

Yingxiang Tao, Moses Lake, WA (US);

James D. Blanchard, Soap Lake, WA (US);

Assignee:

Moses Lake Industries, Inc., Moses Lake, WA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C25D 3/38 (2006.01); H01L 21/288 (2006.01); H01L 31/0224 (2006.01); C25D 17/10 (2006.01); C25D 17/12 (2006.01); C25D 5/00 (2006.01); C25D 17/00 (2006.01); H01L 21/67 (2006.01); H05K 3/24 (2006.01); C25D 5/18 (2006.01);
U.S. Cl.
CPC ...
C25D 3/38 (2013.01); Y02E 10/50 (2013.01); H01L 21/2885 (2013.01); H01L 31/022425 (2013.01); C25D 17/10 (2013.01); H05K 3/241 (2013.01); C25D 17/12 (2013.01); C25D 5/00 (2013.01); C25D 17/001 (2013.01); H01L 21/67011 (2013.01); C25D 5/18 (2013.01);
Abstract

Embodiments of the invention are directed to methods of electroplating copper onto at least one surface of a substrate in which more uniform electrical double layers are formed adjacent to the at least one surface being electroplated (i.e., the cathode) and an anode of an electrochemical cell, respectively. In one embodiment, the electroplated copper may be substantially-free of dendrites, exhibit a high-degree of (111) crystallographic texture, and/or be electroplated at a high-deposition rate (e.g., about 6 μm per minute or more) by electroplating the copper under conditions in which a ratio of a cathode current density at the at least one surface to an anode current density at an anode is at least about 20. In another embodiment, a porous anodic film may be formed on a consumable copper anode using a long conditioning process that promotes forming a more uniform electrical double layer adjacent to the anode.


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