The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2014
Filed:
Jun. 18, 2010
Hubertus Von Der Waydbrink, Dresden, DE;
Thomas Meyer, Dresden, DE;
Michael Hentschel, Dresden, DE;
Reinhardt Bauer, Dresden, DE;
Andrej Wolf, Dresden, DE;
Hans-christian Hecht, Weinboehla, DE;
Hubertus Von Der Waydbrink, Dresden, DE;
Thomas Meyer, Dresden, DE;
Michael Hentschel, Dresden, DE;
Reinhardt Bauer, Dresden, DE;
Andrej Wolf, Dresden, DE;
Hans-Christian Hecht, Weinboehla, DE;
VON ARDENNE Anlagentechnik GmbH, Dresden, DE;
Abstract
A substrate-treatment installation includes a vacuum chamber, a substrate treatment device within the vacuum chamber, a substrate transport device within the vacuum chamber for guiding a substrate along a longitudinal direction in a substrate transport plane past the substrate treatment device, and a device for controlling substrate temperature. The substrate temperature controlling device includes a heat-absorbing cooler on one side of the substrate transport plane and an insulation member selectively displaceable between at least two different positions to vary extent of thermal shielding of the heat-absorbing cooler relative to the substrate transport plane by the insulation member.