The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Sep. 29, 2011
Applicant:
Kenji Yamazoe, Berkeley, CA (US);
Inventor:
Kenji Yamazoe, Berkeley, CA (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/32 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70666 (2013.01); G03F 7/70091 (2013.01); G03F 7/705 (2013.01);
Abstract
A computer-implemented calculation method of calculating a transmission cross coefficient in an apparatus which projects an image of an object onto an image plane via a projection optical system includes: a division step of dividing an effective light source formed on a pupil plane of the projection optical system into a plurality of point sources, a defining step of defining a matrix by arranging each of the plurality of pupil functions generated in the generation step in each row or each column of the matrix, and a calculation step of calculating the transmission cross coefficient based on the matrix defined in the defining step.