The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Feb. 05, 2009
Kouji Muramatsu, Belmont, CA (US);
Osamu Tanitsu, Kumagaya, JP;
Hirohisa Tanaka, Kumagaya, JP;
Masaya Yamamoto, Honji, JP;
Norio Miyake, Tokyo, JP;
Yasushi Mizuno, Saitama, JP;
Ryuji Takaya, Kumagaya, JP;
Risa Yoshimoto, Fukaya, JP;
Hiroyuki Hirota, Fukaya, JP;
Kouji Muramatsu, Belmont, CA (US);
Osamu Tanitsu, Kumagaya, JP;
Hirohisa Tanaka, Kumagaya, JP;
Masaya Yamamoto, Honji, JP;
Norio Miyake, Tokyo, JP;
Yasushi Mizuno, Saitama, JP;
Ryuji Takaya, Kumagaya, JP;
Risa Yoshimoto, Fukaya, JP;
Hiroyuki Hirota, Fukaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.