The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Mar. 13, 2013
Applicant:
SK Hynix Inc., Gyeonggi-do, KR;
Inventors:
Ju-Hyun Myung, Gyeonggi-do, KR;
Eui-Seong Hwang, Gyeonggi-do, KR;
Eun-Shil Park, Gyeonggi-do, KR;
Tae-Yoon Kim, Gyeonggi-do, KR;
Assignee:
SK Hynix Inc., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 27/108 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01); H01L 21/223 (2006.01); H01L 29/165 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7827 (2013.01); H01L 21/2236 (2013.01); H01L 27/10876 (2013.01); H01L 29/165 (2013.01); H01L 27/10885 (2013.01); H01L 29/41741 (2013.01); H01L 29/66666 (2013.01);
Abstract
A semiconductor device includes semiconductor bodies formed substantially perpendicular to a semiconductor substrate, buried bit lines formed in the semiconductor bodies and including a metal silicide; and barrier layers formed under and over the buried bit lines and containing germanium.