The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2014

Filed:

Mar. 29, 2011
Applicants:

Hidekazu Sakagami, Osaka, JP;

Toshinori Okada, Osaka, JP;

Inventors:

Hidekazu Sakagami, Osaka, JP;

Toshinori Okada, Osaka, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05B 1/02 (2006.01); H01L 21/67 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01);
Abstract

A heating control system which allows a plurality of heaters to heat an object without depending on a variation in characteristics among a plurality of heater power sources includes: a thermocouple which detects a temperature of an object to be heated; temperature control means that receives a target temperature and a current temperature, and carries out electric power control so that these temperatures match; electric current and voltage detecting means for detecting an electric power value and a current electric power; and target electric power calculating means that receives the electric power value, and calculates the target electric power by multiplying the electric power value by a given ratio. The temperature control means receives the target electric power and the current electric power, and carries out electric power control so that the current electric power matches the target electric power.


Find Patent Forward Citations

Loading…