The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2014

Filed:

May. 19, 2009
Applicants:

Takashi Fujibayashi, Otsu, JP;

Toshiaki Sasaki, Otsu, JP;

Yuko Tawada, Otsu, JP;

Inventors:

Takashi Fujibayashi, Otsu, JP;

Toshiaki Sasaki, Otsu, JP;

Yuko Tawada, Otsu, JP;

Assignee:

Kaneka Corporation, Osaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/0352 (2006.01); H01L 31/076 (2012.01); H01L 31/075 (2012.01); C23C 16/46 (2006.01); C23C 16/40 (2006.01); H01L 31/0224 (2006.01); H01L 31/0392 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/035281 (2013.01); H01L 31/0352 (2013.01); C23C 16/407 (2013.01); C23C 16/46 (2013.01); H01L 31/022466 (2013.01); H01L 31/03921 (2013.01); H01L 31/075 (2013.01); H01L 31/076 (2013.01); H01L 31/1804 (2013.01); H01L 31/1884 (2013.01); Y02E 10/548 (2013.01); Y02E 10/547 (2013.01);
Abstract

Provided is a thin film photoelectric conversion device with maximized output characteristic, which is achieved by improving an uneven current value of a photoelectric conversion cell caused by an uneven film thickness and an uneven film quality of a photoelectric conversion semiconductor layer, which may be generated in scaling up an integrated-type thin film photoelectric conversion device. The thin film photoelectric conversion device includes: a substrate, a transparent electrode layer, a photoelectric conversion unit, and a back electrode layer. An increasing rate ΔZt of the film thickness Zt of the transparent electrode layer along X and an increasing rate ΔZs of the film thickness Zs of the photoelectric conversion unit along X have different signs, wherein one line segment in a parallel direction to a main surface of the substrate is taken as X″.


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