The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2014

Filed:

Mar. 08, 2011
Applicants:

Kimberly Dona Pollard, Anderson, IN (US);

Allison C. Rector, Indianapolis, IN (US);

Inventors:

Kimberly Dona Pollard, Anderson, IN (US);

Allison C. Rector, Indianapolis, IN (US);

Assignee:

Dynaloy, LLC, Kingsport, TN (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/22 (2006.01); H01L 21/228 (2006.01); H01L 21/225 (2006.01);
U.S. Cl.
CPC ...
H01L 21/228 (2013.01); H01L 21/2225 (2013.01); H01L 21/2254 (2013.01);
Abstract

Compositions and methods for doping silicon substrates by treating the substrate with a diluted dopant solution comprising tetraethylene glycol dimethyl ether (tetraglyme) and a dopant-containing material and subsequently diffusing the dopant into the surface by rapid thermal annealing. Diethyl-1-propylphosphonate and allylboronic acid pinacol ester are preferred dopant-containing materials, and are preferably included in the diluted dopant solution in an amount ranging from about 1% to about 20%, with a dopant amount of 4% or less being more preferred.


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