The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2014

Filed:

May. 01, 2012
Applicants:

Myung-ki Lee, Yongin, KR;

Sung-bong Lee, Yongin, KR;

Myong-hwan Choi, Yongin, KR;

Mu-hyun Kim, Yongin, KR;

Inventors:

Myung-Ki Lee, Yongin, KR;

Sung-Bong Lee, Yongin, KR;

Myong-Hwan Choi, Yongin, KR;

Mu-Hyun Kim, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C23C 14/12 (2006.01); H01L 51/00 (2006.01); C23C 14/04 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); C23C 14/12 (2013.01); C23C 14/042 (2013.01); H01L 51/56 (2013.01);
Abstract

A patterning slit sheet assembly to perform a deposition process to deposit a thin film on a substrate in a fine pattern. A patterning slit sheet assembly includes a patterning slit sheet including a slit unit, and a non-slit region that is located along edges of the slit unit, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; a frame combined with the patterning slit sheet to support the patterning slit sheet; and a shielding unit extending on at least one inner side of the frame and overlapping an area including the edges of the slit unit.


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