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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8906589 B1

PDFFull Text
Date of Patent:
Dec. 09, 2014

Filed:

Feb. 15, 2011

Salt and photoresist composition comprising the same

Applicants:

Koji Ichikawa, Toyonaka, JP;

Hiromu Sakamoto, Ibaraki, JP;

Inventors:

Koji Ichikawa, Toyonaka, JP;

Hiromu Sakamoto, Ibaraki, JP;

Assignee:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Anca Eoff

Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/028 (2006.01); G03F 7/26 (2006.01); C08F 18/20 (2006.01); C07C 309/06 (2006.01); C08F 212/14 (2006.01); G03F 7/029 (2006.01); C07C 25/18 (2006.01); C07C 309/12 (2006.01); C07C 309/17 (2006.01); C07C 381/12 (2006.01); C07D 333/46 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
C08F 212/14 (2013.01); C07C 309/06 (2013.01); G03F 7/029 (2013.01); C07C 25/18 (2013.01); C07C 309/12 (2013.01); C07C 309/17 (2013.01); C07C 381/12 (2013.01); C07D 333/46 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); Y10S 430/122 (2013.01); Y10S 430/126 (2013.01);
Abstract

The present invention provides a salt represented by the formula (I): wherein Rand Reach independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, Xrepresents a C1-C17 divalent saturated hydrocarbon group in which one or more —CH— can be replaced by —O— or —CO— and which can have one or more fluorine atoms, Rrepresents a hydrogen atom or a methyl group, and Zrepresents an organic counter cation, and a photoresist composition containing the same.

Find Patent Forward Citations

Ichikawa, Koji. (2014). Salt and photoresist composition comprising the same (U.S. Patent No. 8906589). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8906589

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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