The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Sep. 29, 2009
Masato Kinouchi, Kanagawa, JP;
Takayuki Goto, Kanagawa, JP;
Satoshi Tawara, Nagasaki, JP;
Takeshi Tsuno, Kanagawa, JP;
Jun Utsumi, Kanagawa, JP;
Kensuke Ide, Shiga, JP;
Takenori Suzuki, Shiga, JP;
Masato Kinouchi, Kanagawa, JP;
Takayuki Goto, Kanagawa, JP;
Satoshi Tawara, Nagasaki, JP;
Takeshi Tsuno, Kanagawa, JP;
Jun Utsumi, Kanagawa, JP;
Kensuke Ide, Shiga, JP;
Takenori Suzuki, Shiga, JP;
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Abstract
A room temperature bonding apparatus according to the present invention is provided with a load lock chamber having an internal space which is pressure-reduced; and a cartridge arranged in the load lock chamber. The cartridge includes an island portion formed to contact a substrate when the substrate is put on the cartridge. A flow passage is formed for the island portion to connect a space between the cartridge and the substrate to outside when the substrate is put on the cartridge. Therefore, in the room temperature bonding apparatus can prevent making the substrate is moved to the cartridge due to gas when the internal space is pressure-reduced.