The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
May. 20, 2009
Applicants:
Claus-peter Klages, Braunschweig, DE;
Michael Thomas, Lehrte, DE;
Inventors:
Claus-Peter Klages, Braunschweig, DE;
Michael Thomas, Lehrte, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); H01J 37/32 (2006.01); B05D 7/24 (2006.01); B29C 59/14 (2006.01); H01L 21/3065 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); C23C 16/505 (2006.01); B05D 3/14 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32532 (2013.01); B05D 3/141 (2013.01); C23C 16/45568 (2013.01); C23C 16/402 (2013.01); H01J 37/32009 (2013.01); H01J 37/32366 (2013.01); C23C 16/505 (2013.01); B29C 59/14 (2013.01); C23C 16/45559 (2013.01);
Abstract
The invention relates to a plasma stamp, with which surfaces can be subjected to a plasma treatment. In addition, the invention relates to a plasma treatment device, with which surfaces can be subjected to a plasma treatment, and also a plasma treatment method. In addition, the invention relates to a method for producing a plasma stamp.