The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Nov. 04, 2013
Applicant:
Samsung Display Co., Ltd., Yongin, KR;
Inventors:
Damien Boesch, Mountain View, CA (US);
Martin Rosenblum, Menlo Park, CA (US);
Assignee:
Samsung Display Co., Ltd., Yongin, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F25B 41/06 (2006.01); F25B 39/02 (2006.01); F16L 5/00 (2006.01); F24C 7/10 (2006.01); A21B 1/00 (2006.01); A62C 31/02 (2006.01); C23C 16/448 (2006.01); B05B 17/06 (2006.01); B01B 1/06 (2006.01); C23C 16/455 (2006.01); C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45563 (2013.01); C23C 16/4485 (2013.01); B05B 17/06 (2013.01); B01B 1/06 (2013.01); C23C 14/243 (2013.01); Y10S 165/911 (2013.01);
Abstract
An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.