The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Mar. 28, 2014
Ngk Insulators, Ltd., Aichi, JP;
Ngk Ceramic Device Co., Ltd., Aichi, JP;
Yuji Hori, Owariasahi, JP;
Tomoyoshi Tai, Inazawa, JP;
Yasunori Iwasaki, Kitanagoa, JP;
Takahiro Yamadera, Nagoya, JP;
Ryosuke Hattori, Ichinomiya, JP;
Kengo Suzuki, Nagoya, JP;
NGK Insulators, Ltd., Aichi, JP;
NGK Ceramic Device Co., Ltd., Aichi, JP;
Abstract
The present invention provides a composite substrate comprising a piezoelectric substrate that is a single-crystal lithium tantalate or lithium niobate substrate, a support substrate that is a single-crystal silicon substrate, and an amorphous layer containing argon and joining together the piezoelectric substrate and the support substrate. The amorphous layer includes, in order from the piezoelectric substrate toward the composite substrate, a first layer, a second layer, and a third layer. The first layer contains a larger amount of a constituent element of the piezoelectric substrate than the second and third layers, the third layer contains a larger amount of a constituent element of the support substrate than the first and second layers, and the second layer contains a larger amount of argon than the first and third layers.