The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Oct. 22, 2009
Aarnoud Laurens Roest, Geldrop, NL;
Mareike Klee, Straelen, DE;
Rudiger Gunter Mauczok, Erkelenz, DE;
Linda Van Leuken-peters, Maarheeze, NL;
Robertus Adrianus Maria Wolters, Eindhoven, NL;
Aarnoud Laurens Roest, Geldrop, NL;
Mareike Klee, Straelen, DE;
Rudiger Gunter Mauczok, Erkelenz, DE;
Linda Van Leuken-Peters, Maarheeze, NL;
Robertus Adrianus Maria Wolters, Eindhoven, NL;
NXP, B.V., Eindhoven, NL;
Abstract
The present invention relates to an electronic component, that comprises, on a substrate, at least one integrated MIM capacitor, () an electrically insulating first cover layer () which partly or fully covers the top capacitor electrode () and is made of a lead-containing dielectric material, and a top barrier layer () on the first cover layer. The top barrier layer serves for avoiding a reduction of lead atoms comprised by the first cover layer under exposure of the first cover layer to a reducing substance. An electrically insulating second cover layer () on the top barrier layer has a dielectric permittivity smaller than that of the first cover layer establishes a low parasitic capacitance of the cover-layer structure. The described cover-layer structure with the intermediate top barrier layer allows to fabricate a high-accuracy resistor layer () on top.