The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2014

Filed:

Mar. 12, 2013
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Yong-Hyun Jin, Yongin, KR;

Jae-Ha Lim, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/335 (2006.01); H01L 21/677 (2006.01); C23C 14/04 (2006.01); C23C 14/50 (2006.01); C23C 14/56 (2006.01); H01L 27/32 (2006.01); C23C 14/24 (2006.01); H01L 21/67 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67011 (2013.01); H01L 21/6776 (2013.01); H01L 21/67709 (2013.01); C23C 14/042 (2013.01); C23C 14/50 (2013.01); C23C 14/568 (2013.01); H01L 27/3258 (2013.01); H01L 27/3244 (2013.01); C23C 14/24 (2013.01); H01L 51/0011 (2013.01);
Abstract

An organic layer deposition apparatus includes a transfer unit; a first conveyer unit including a guide member having accommodation grooves, a first accommodation part, a second accommodation part, and a connection part that connects the first accommodation part to the second accommodation part; a second conveyer unit for moving the transfer unit without the substrate; a loading unit for fixing the substrate on the transfer unit; a deposition unit including a chamber and an organic layer deposition assembly; and an unloading unit for separating the substrate, wherein the first accommodation part of the guide member is located close to ground compared to the second accommodation part, and includes a lower member, an upper member, elastic members located between the lower and upper members. The substrate fixed on the transfer unit is spaced from the organic layer deposition assembly while being transferred by the first conveyer unit.


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