The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Mar. 21, 2012
Haruyuki Sorada, Okayama, JP;
Takumi Mikawa, Shiga, JP;
Kenji Tominaga, Kyoto, JP;
Kiyotaka Tsuji, Osaka, JP;
Haruyuki Sorada, Okayama, JP;
Takumi Mikawa, Shiga, JP;
Kenji Tominaga, Kyoto, JP;
Kiyotaka Tsuji, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A method of manufacturing a nonvolatile memory device that is a variable resistance nonvolatile memory device, which has good consistency with a dual damascene process that is suitable for the formation of fine copper lines and which enables large capacity and high integration. This method includes: forming a variable resistance element, a contact hole and a line groove; and forming a current steering layer of a bidirectional diode element above interlayer insulating layers and a variable resistance layer to cover the line groove without covering a bottom surface of the contact hole.