The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8900953 B1

Expired

Date of Patent:

Dec. 02, 2014

Filed:

Aug. 28, 2009

Crystal manufacturing apparatus, semiconductor device manufactured using the same, and method of manufacturing semiconductor device using the same

Applicants:

Seiichiro Higashi, Higashihiroshima, JP;

Naohiro Koba, Higashihiroshima, JP;

Inventors:

Seiichiro Higashi, Higashihiroshima, JP;

Naohiro Koba, Higashihiroshima, JP;

Assignee:

Hiroshima University, Hiroshima, JP;

Attorney:

Lowe Hauptman & Ham, LLP

Primary Examiner:

Matthew E Warren

Int. Cl.

CPC ...

H01L 21/336 (2006.01); H01L 21/67 (2006.01); H01L 31/18 (2006.01); H01L 29/786 (2006.01); C30B 35/00 (2006.01); H01L 27/12 (2006.01); C30B 28/06 (2006.01); C30B 29/06 (2006.01); C01B 33/02 (2006.01); H01L 21/02 (2006.01);

U.S. Cl.

CPC ...

H01L 31/1892 (2013.01); H01L 21/67248 (2013.01); H01L 31/1804 (2013.01); H01L 29/78603 (2013.01); Y02E 10/547 (2013.01); H01L 21/02422 (2013.01); C30B 35/00 (2013.01); H01L 27/1214 (2013.01); C30B 28/06 (2013.01); C30B 29/06 (2013.01); H01L 21/6715 (2013.01); H01L 29/78636 (2013.01); H01L 21/02667 (2013.01); H01L 21/02532 (2013.01); H01L 21/02625 (2013.01); C01B 33/02 (2013.01);

Abstract

A crystal manufacturing apparatus capable of manufacturing a crystal in a desired position on a substrate is provided. A spring has one end fixed to a mount and the other end coupled to a magnetic body. The magnetic body has one end coupled to the spring and the other end coupled to a piston. A coil is wound around the magnetic body and electrically connected between a power supply circuit and a ground node (GND). The piston has a linear member inserted in a cylinder. The cylinder has a hollow columnar shape and a small hole at a bottom surface. The cylinder holds a silicon melt. A substrate is supported by an XY stage to be opposed to the small hole of the cylinder. The power supply circuit passes pulse shaped current through the coil to move the piston in an up-down direction (DR). As a result, a droplet is discharged toward the substrate from the small hole at an initial speed of 1.02 m/s.

Find Patent Forward Citations

Higashi, Seiichiro. (2014). Crystal manufacturing apparatus, semiconductor device manufactured using the same, and method of manufacturing semiconductor device using the same (U.S. Patent No. 8900953). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8900953

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile