The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2014

Filed:

Apr. 06, 2011
Applicants:

Joerg Rockenberger, San Jose, CA (US);

Fabio Zürcher, Brisbane, CA (US);

Mao Takashima, Cupertino, CA (US);

Inventors:

Joerg Rockenberger, San Jose, CA (US);

Fabio Zürcher, Brisbane, CA (US);

Mao Takashima, Cupertino, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/078 (2012.01); H01L 21/02 (2006.01); H01L 31/068 (2012.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0237 (2013.01); Y02E 10/547 (2013.01); H01L 21/02661 (2013.01); H01L 21/02628 (2013.01); H01L 21/02428 (2013.01); H01L 31/068 (2013.01); H01L 21/02587 (2013.01); H01L 31/1804 (2013.01); H01L 21/02532 (2013.01); H01L 21/02494 (2013.01); H01L 21/0243 (2013.01);
Abstract

Epitaxial structures, methods of making epitaxial structures, and devices incorporating such epitaxial structures are disclosed. The methods and the structures employ a liquid-phase Group IVA semiconductor element precursor ink (e.g., including a cyclo- and/or polysilane) and have a relatively good film quality (e.g., texture, density and/or purity). The Group IVA semiconductor element precursor ink forms an epitaxial film or feature when deposited on a (poly)crystalline substrate surface and heated sufficiently for the Group IVA semiconductor precursor film or feature to adopt the (poly)crystalline structure of the substrate surface. Devices incorporating a selective emitter that includes the present epitaxial structure may exhibit improved power conversion efficiency relative to a device having a selective emitter made without such a structure due to the improved film quality and/or the perfect interface formed in regions between the epitaxial film and contacts formed on the film.


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