The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Sep. 26, 2012
Shigemasa Nakasugi, Kakegawa, JP;
Shinji Miyazaki, Kakegawa, JP;
Munirathna Padmanaban, Bridgewater, NJ (US);
Alberto D. Dioses, Doylestown, PA (US);
Shigemasa Nakasugi, Kakegawa, JP;
Shinji Miyazaki, Kakegawa, JP;
Munirathna Padmanaban, Bridgewater, NJ (US);
Alberto D. Dioses, Doylestown, PA (US);
AZ Electronic Materials (Luxembourg) S.A.R.L., Luxembourg, LU;
Abstract
The present invention provides a cross-linking agent capable of preventing formation of scum from a bottom anti-reflective coating, and also provides a composition for forming a bottom anti-reflection coating containing the agent. The cross-linking agent is a nitrogen-containing aromatic compound having at least one vinyloxy group or N-methoxymethylamide group, and the composition contains the cross-linking agent. The cross-linking agent of the formula (1) can be produced by reaction of a nitrogen-containing aromatic compound, a halogen compound having a vinyloxy group or N-methoxymethylamide group and a basic compound.