The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Feb. 28, 2011
Takahiro Ibe, Kanagawa-ken, JP;
Tomoya Aoyama, Kanagawa-ken, JP;
Rena Tsuruoka, Hyogo, JP;
Satoshi Inoue, Osaka, JP;
Tohru Sonoda, Osaka, JP;
Takahiro Ibe, Kanagawa-ken, JP;
Tomoya Aoyama, Kanagawa-ken, JP;
Rena Tsuruoka, Hyogo, JP;
Satoshi Inoue, Osaka, JP;
Tohru Sonoda, Osaka, JP;
Abstract
One embodiment of the present invention is a deposition method for forming a layercontaining a deposition material on a deposition target surface of a second substrate, comprising the steps of forming an absorbing layerover one surface of a first substrate; forming a material layercontaining the deposition material over the absorbing layer; performing first heat treatment on the material layer from the other surface of the first substrate to a temperature lower than the sublimation temperature of the deposition material so as to remove an impurityin the material layer; disposing the one surface of the first substrate and the deposition target surface of the second substrate to face each other; and performing second heat treatment on the material layer from the other surface of the first substrate.