The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Sep. 27, 2010
Applicants:
Daniel Borrello, Cortaillod, CH;
Evelyne Vallat-sauvain, Chezard-St. Martin, CH;
Ulrich Kroll, Corcelles, CH;
Johannes Meier, Corcelles, CH;
Inventors:
Daniel Borrello, Cortaillod, CH;
Evelyne Vallat-Sauvain, Chezard-St. Martin, CH;
Ulrich Kroll, Corcelles, CH;
Johannes Meier, Corcelles, CH;
Assignee:
Tel Solar AG, Trubbach, CH;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/02 (2006.01); C23C 16/40 (2006.01); C23C 14/08 (2006.01); H01L 31/0368 (2006.01); H01L 31/075 (2012.01); H01L 31/0376 (2006.01); C23C 16/02 (2006.01); H01L 31/0747 (2012.01); C23C 30/00 (2006.01); H01L 31/0224 (2006.01); H01L 31/18 (2006.01); H01L 31/0236 (2006.01); H01L 31/0392 (2006.01);
U.S. Cl.
CPC ...
C23C 16/0245 (2013.01); Y02E 10/548 (2013.01); C23C 14/086 (2013.01); H01L 31/03685 (2013.01); H01L 31/075 (2013.01); C23C 16/407 (2013.01); H01L 31/03762 (2013.01); Y02E 10/545 (2013.01); H01L 31/0747 (2013.01); C23C 30/00 (2013.01); C23C 14/021 (2013.01); H01L 31/022466 (2013.01); H01L 31/1884 (2013.01); H01L 31/0236 (2013.01); H01L 31/03921 (2013.01);
Abstract
There is provided a method of coating a substrate with a zinc oxide film. The method includes (a) providing a substrate with at least one substantially flat surface, (b) subjecting the surface at least partially to a plasma-etching process, and (c) depositing on the etched surface, a layer that includes zinc oxide. The method is particularly suitable for manufacturing solar cells.